Staged membrane system for gas, vapor, and liquid separations

ABSTRACT

The present invention involves the use of a multi-stage membrane system for gas, vapor, and liquid separations. In this multi-stage membrane system, high selectivity and high permeance or at least high selectivity polybenzoxazole membranes or cross-linked polybenzoxazole membranes are applied for a pre-membrane or both the pre-membrane and the secondary membrane. A primary membrane can be from conventional glassy polymers. This multi-stage membrane system can reduce inter-stage compression cost, increase product recovery and product purity for gas, vapor, and liquid separations. It can also save the cost compared to the system using all the high cost polybenzoxazole membranes or cross-linked polybenzoxazole membranes.

BACKGROUND OF THE INVENTION

The present invention involves the use of a multi-stage membrane systemfor gas, vapor, and liquid separations. This membrane system can reduceinter-stage compression cost, increase product recovery and productpurity for gas, vapor, and liquid separations. In this configuration,two types of membranes will be used. One is a membrane with both highselectivity and high permeance or at least high selectivity, which is atleast greater than 20, preferably greater than 30, but the cost ofmanufacturing such a membrane is relatively high. The other membrane isthe commercially available membrane with lower selectivity.

Multi-stage membranes are used to increase the product recovery or theproduct purity for commercial application. For example, in aconventional two-stage membrane system to recover the useful product, apermeate that passes through the primary membrane will be compressed andthen will pass through the secondary membrane. The residue from thesecondary membrane is then recycled to the primary membrane. Thistwo-stage membrane configuration can significantly increase the productrecovery compared to a one-stage membrane system. The two-stage systemcan also be used to obtain high purity permeate product. However, therequired compressor power is generally high since the permeate from theprimary membrane is compressed in this process configuration.

It is important to reduce the compression cost while maintaining thelevel of product recovery in any new configuration. In the presentinvention, a preliminary membrane (referred to herein as a“pre-membrane”) with both high selectivity and high permeance or atleast one with high selectivity, which is at least greater than 20,preferably greater than 30, is used. The permeate from the pre-membranewill not be compressed and sent to the secondary membrane, but instead,it will be directly sent to either the waste stream or product stream.Since the selectivity of the pre-membrane unit is very high, themembrane will provide either low product (as retentate) loss, or highpurity product (as permeate).

It is further desirable to increase the retentate product recoveryand/or permeate product purity by applying the high selectivity and highpermeance or at least high selectivity, which is at least greater than20, preferably greater than 30, membrane as both the pre-membrane andthe secondary membrane in the proposed membrane system configuration.Since the pre-membrane area and the second-stage membrane area arerelatively small compared to that of the primary membrane, the newmembrane system will not significantly increase the cost of whole systemeven the high cost membranes are used for the pre-membrane and secondarymembrane.

Preferably the membrane materials for the pre-membrane and secondarymembrane of the multi-stage membrane system in the present invention areselected from polybenzoxazole polymers and cross-linked polybenzoxazolepolymers that have both high selectivity and high permeability or haveat least high selectivity.

A recent publication in the journal SCIENCE reported on a new type ofhigh permeability polybenzoxazole polymer membrane for gas separations(Ho Bum Park et al, SCIENCE 318, 254 (2007)). These polybenzoxazolemembranes are prepared from high temperature thermal rearrangement ofpolyimide polymer membranes containing pendent hydroxyl groups ortho tothe heterocyclic imide nitrogen. These polybenzoxazole polymer membranesexhibited extremely high CO₂ permeability (>1000 Barrer) for CO₂/CH₄separation. These polybenzoxazole polymer membranes have very goodthermal stability at elevated temperature.

SUMMARY OF THE INVENTION

The present invention uses high performance polybenzoxazole polymer andcross-linked polybenzoxazole polymer membranes that are different fromthe prior art. These new membranes have easy processability, highselectivity, high permeability, high thermal stability, and highresistance to solvent swelling, plasticization and hydrocarboncontaminants.

The present invention applies this new type of membranes as thepre-membrane and secondary membrane, and succeeding stages in amulti-stage membrane system.

The present invention involves a process for separating a mixture ofgases or liquids comprising sending said mixture of gases or liquids toa pre-membrane unit to separate them into a first permeate streampassing through the membrane within said pre-membrane unit and a firstretentate stream that does not pass through said pre-membrane unitwherein said pre-membrane unit comprises a membrane with both highselectivity and high permeance or at least high selectivity, which is atleast greater than 20, preferably greater than 30; sending said firstretentate stream to a primary membrane unit to separate said firstretentate stream into a second permeate stream and a second retentatestream wherein the primary membrane unit comprises at least one glassypolymer membrane; and then sending the second permeate stream to asecondary membrane unit to separate it into a third permeate stream anda third retentate stream wherein the secondary membrane unit comprisesat least one glassy polymer membrane.

The present invention also involves a system for separation of mixturesof gases or liquids comprising a pre-membrane unit, a primary membraneunit and a secondary membrane unit wherein said pre-membrane unitcomprises a membrane with both high selectivity and high permeance or atleast high selectivity, which is at least greater than 20, preferablygreater than 30, and said primary membrane unit and secondary membraneunit comprise at least one glassy polymer and wherein a liquid or gasmixture is separated into a retentate stream and a permeate stream byeach of said pre-membrane unit, said primary membrane unit and saidsecondary membrane unit in sequence. The both high selectivity and highpermeance or at least high selectivity membrane comprises at least onepolybenzoxazole polymer membrane or at least one crosslinkedpolybenzoxazole polymer membrane.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a conventional two stage-membrane system with the retentateas the product.

FIG. 2 shows a conventional two stage-membrane system with the permeateas the product.

FIG. 3 shows a multi-stage membrane system of the present invention withthe retentate as the product.

FIG. 4 shows a multi-stage membrane system of the present invention withthe permeate as the product.

DETAILED DESCRIPTION OF THE INVENTION

The present invention involves the use of a multi-stage membrane systemfor gas, vapor, and liquid separations. In this multi-stage membranesystem, high selectivity and high permeance or at least high selectivitymembranes, which have selectivity at least greater than 20, preferablygreater than 30, are applied for the pre-membrane and secondarymembrane. This multi-stage membrane system can reduce inter-stagecompression cost, increase product recovery and product purity for gasand vapor separations. It can also save the cost compared to a systemusing all high cost polybenzoxazole membranes or cross-linkedpolybenzoxazole membranes. The both high selectivity and high permeanceor at least high selectivity membrane comprises at least onepolybenzoxazole polymer membrane or at least one crosslinkedpolybenzoxazole polymer membrane. The polybenzoxazole-type of polymermaterials as reported in the literature (see Ho Bum Park et al, SCIENCE,318, 254 (2007)) are selected as one of the membrane materials to makethe membrane for the pre-membrane and secondary membrane in themulti-stage membrane system and process in the present invention. Thepolybenzoxazole-type of polymer materials used in the present inventioncan be prepared from thermal conversion of any hydroxy-containingpolyimides with pendent hydroxyl groups ortho to the heterocyclic imidenitrogen upon heating between 250° C. and 600° C. under inert atmospheresuch as nitrogen or vacuum. The thermal conversion is accompanied byloss of carbon dioxide and no other volatile byproducts are generated.These hydroxy-containing polyimide polymers comprise a plurality offirst repeating units of a formula (I), wherein said formula (I) is:

where X₁ of formula (I) is selected from the group consisting of

and mixtures thereof, —X₂— of formula (I) is selected from the groupconsisting of

and mixtures thereof, and —R— is selected from the group consisting of

and mixtures thereof.

It is preferred that X₁ group of formula (I) is selected from the groupconsisting of

and mixtures thereof.

It is preferred that —X₂— group of formula (I) is selected from thegroup consisting of

and mixtures thereof, and it is preferred that —R— group is representedby the formula:

Some preferred hydroxy-containing polyimide polymers that are used inthe present invention include, but are not limited to,poly[2,2′-bis-(3,4-dicarboxyphenyl) hexafluoropropanedianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(6FDA-APAF)), poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BTDA-APAF)), poly(3,3′,4,4′-benzophenonetetracarboxylicdianhydride-3,3′-dihydroxy-4,4′-diamino-biphenyl) (poly(BTDA-HAB)),poly[4,4′-oxydiphthalicanhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(ODPA-APAF)), poly[3,3′,4,4′-diphenylsulfone tetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(DSDA-APAF)), poly(3,3′,4,4′-diphenylsulfone tetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl)(poly(DSDA-APAF-HAB)), poly[2,2′-bis-(3,4-dicarboxyphenyl)hexafluoropropane dianhydride-3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(6FDA-BTDA-APAF)), poly[4,4′-oxydiphthalicanhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl](poly(ODPA-APAF-HAB)), poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl](poly(BTDA-APAF-HAB)), poly[2,2′-bis-(3,4-dicarboxyphenyl)hexafluoropropane dianhydride-3,3′-dihydroxy-4,4′-diamino-biphenyl](poly(6FDA-HAB)), and poly(4,4′-bisphenol Adianhydride-3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BPADA-BTDA-APAF)).

The hydroxy-containing polyimide polymers with pendent hydroxyl groupsortho to the heterocyclic imide nitrogen that are used for thepreparation of the polybenzoxazole-type of membrane as the pre-membraneand secondary membrane in the multi-stage membrane process in thepresent invention are synthesized from diamines and dianhydrides inpolar solvents such as 1-methyl-2-pyrrolidione (NMP) orN,N-dimethylacetamide (DMAc) by a two-step process involving theformation of the poly(amic acid)s followed by a solution imidization ora thermal imidization. Acetic anhydride is a preferred dehydrating agentand pyridine (or triethylamine) is a preferred imidization catalyst forthe solution imidization reaction as described in the examples herein.Then, a polyimide membrane is prepared from the hydroxy-containingpolyimide polymer in any convenient form such as sheet, disk, thin filmcomposite, tube, or hollow fiber. The polybenzoxazole-type of membraneas the pre-membrane and secondary membrane in the multi-stage membraneprocess in the present invention is prepared from thermal conversion ofthe hydroxy-containing polyimide membrane upon heating between 250° and600° C. under inert atmosphere such as nitrogen or vacuum. For example,polybenzoxazole membranes can be prepared from a hydroxyl-containingpolyimide (poly[2,2′-bis-(3,4-dicarboxyphenyl) hexafluoropropanedianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane],poly(6FDA-APAF)) membrane via a high temperature heat treatment at 400°C. and 450° C., respectively. The poly(6FDA-APAF) polyimide polymer wassynthesized from solution condensation of2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane diamine monomer(Bis-APAF) and 2,2′-bis-(3,4-dicarboxyphenyl) hexafluoropropanedianhydride monomer (6FDA).

The polybenzoxazole-type of membranes used as the pre-membrane andsecondary membrane in the multi-stage membrane process in the presentinvention can be fabricated into any convenient form such as sheet,disk, tube, or hollow fiber. These membranes can also be fabricated intothin film composite membranes incorporating a selective thinpolybenzoxazole layer and a porous supporting layer comprising adifferent polymer material or an inorganic material.

Another type of membrane that may be used as the pre-membrane andsecondary membrane in the multi-stage membrane process in the presentinvention is a new type of cross-linked polybenzoxazole polymermembrane. The cross-linked polybenzoxazole polymer membrane as thepre-membrane and the secondary membrane in the multi-stage membraneprocess in the present invention is prepared from cross-linkablepolyimide polymers comprising both UV cross-linkable functional groupsin the polymer backbone and pendent hydroxyl groups ortho to theheterocyclic imide nitrogen via thermal conversion followed by UVradiation. The cross-linked polybenzoxazole polymer membranes describedin the current invention comprise polybenzoxazole polymer chain segmentswherein at least a part of these polymer chain segments are cross-linkedto each other through possible direct covalent bonds by exposure to UVradiation or other crosslinking process. The cross-linking of thepolybenzoxazole polymer membranes provides the membranes withsignificantly improved membrane selectivity and chemical and thermalstabilities.

The cross-linked polybenzoxazole polymer membranes as the pre-membraneand secondary membrane in the multi-stage membrane process in thepresent invention are prepared by: 1) first synthesizing both hydroxy-and UV cross-linkable functional group-containing polyimide polymercomprising pendent hydroxyl groups ortho to the heterocyclic imidenitrogen and UV cross-linkable functional groups in the polymerbackbone; 2) fabricating a polyimide membrane from the hydroxy- and UVcross-linkable functional group-containing polyimide polymer; 3)converting the polyimide membrane to polybenzoxazole membrane by heatingbetween 250° and 600° C. under inert atmosphere such as nitrogen orvacuum; and 4) finally converting the polybenzoxazole membrane to newcross-linked polybenzoxazole polymer membrane by UV radiation. In somecases a membrane post-treatment step can be added after step 4) bycoating the top surface of the cross-linked polybenzoxazole polymermembrane with a thin layer of high permeability material such as apolysiloxane, a fluoro-polymer, a thermally curable silicone rubber, ora UV radiation curable epoxy silicone.

The polybenzoxazole-type of polymer membranes used in the presentinvention for the preparation of the cross-linked polybenzoxazolepolymer membranes can be prepared from thermal conversion of bothhydroxy- and UV cross-linkable functional group-containing polyimideswith UV cross-linkable functional groups in the polymer backbone andpendent hydroxyl groups ortho to the heterocyclic imide nitrogen uponheating between 250 and 600° C. under nitrogen or vacuum. The thermalconversion is accompanied by loss of carbon dioxide and no othervolatile byproducts are generated.

The both hydroxy- and UV cross-linkable functional group-containingpolyimide polymers that are used for the preparation of the cross-linkedpolybenzoxazole-type of membrane as the pre-membrane and secondarymembrane in the multi-stage membrane process in the present inventioncomprises a plurality of first repeating units of a formula (II),wherein said formula (II) is:

where X3 of formula (II) is

or mixtures thereof, X4 of formula (II) is either the same as X3 or isselected from

or mixtures thereof, —Y— of formula (II) is

or mixtures thereof, —R— is

or mixtures thereof.

In one embodiment of the invention, when the preferred X3 and X4 offormula (II) are the same, they are selected from the group of:

or mixtures thereof.

In another embodiment of the invention, X3 of formula (II) is selectedfrom the group of:

or mixtures thereof, X4 of said formula (II) is selected from the groupof:

or mixtures thereof.

Some of the preferred both hydroxy- and UV cross-linkable functionalgroup-containing polyimide polymers that are used for the preparation ofthe cross-linked polybenzoxazole-type of membrane as the pre-membraneand secondary membrane in the multi-stage membrane process in thepresent invention include, but are not limited to,poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BTDA-APAF)), poly[4,4′-oxydiphthalicanhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(ODPA-APAF)), poly(3,3′,4,4′-benzophenonetetracarboxylicdianhydride-3,3′-dihydroxy-4,4′-diamino-biphenyl) (poly(BTDA-HAB)),poly[3,3′,4,4′-diphenylsulfone tetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(DSDA-APAF)), poly(3,3′,4,4′-diphenylsulfone tetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl)(poly(DSDA-APAF-HAB)), poly[2,2′-bis-(3,4-dicarboxyphenyl)hexafluoropropane dianhydride-3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(6FDA-BTDA-APAF)), poly[4,4′-oxydiphthalicanhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl](poly(ODPA-APAF-HAB)), poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane-3,3′-dihydroxy-4,4′-diamino-biphenyl](poly(BTDA-APAF-HAB)), and poly(4,4′-bisphenol Adianhydride-3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BPADA-BTDA-APAF)).

The both hydroxy- and UV cross-linkable functional group-containingpolyimide polymers that are used for the preparation of the cross-linkedpolybenzoxazole-type of membrane as the pre-membrane and secondarymembrane in the multi-stage membrane process in the present inventionare synthesized from diamines and dianhydrides in polar solvents such as1-methyl-2-pyrrolidione (NMP) or N,N-dimethylacetamide (DMAc) by atwo-step process involving the formation of the poly(amic acid)sfollowed by a solution imidization or a thermal imidization. Aceticanhydride is used as the dehydrating agent and pyridine (ortriethylamine) is used as the imidization catalyst for the solutionimidization reaction.

The polyimide membrane that is used for the preparation of thecross-linked polybenzoxazole-type of membrane in the present inventioncan be fabricated into a thin film composite membrane from the bothhydroxy- and UV cross-linkable functional group-containing polyimidepolymer by casting a homogeneous polyimide solution on top of a cleanglass plate and allowing the solvent to evaporate slowly inside aplastic cover for at least 12 hours at room temperature. The membrane isthen detached from the glass plate and dried at room temperature for 24hours and then at 200° C. for at least 48 hours under vacuum.

The solvents used for dissolving the polyimide polymer are chosenprimarily for their ability to completely dissolve the polymers and forease of solvent removal in the membrane formation steps. Otherconsiderations in the selection of solvents include low toxicity, lowcorrosive activity, low environmental hazard potential, availability andcost. Representative solvents for use in this invention include mostamide solvents that are typically used for the formation of polymericmembranes, such as such as N-methylpyrrolidone (NMP) and N,N-dimethylacetamide (DMAC), methylene chloride, tetrahydrofuran (THF), acetone,N,N-dimethylformamide (DMF), dimethyl sulfoxide (DMSO), toluene,dioxanes, 1,3-dioxolane, mixtures thereof, and mixtures thereof. Othersolvents as known to those skilled in the art may also be used.

The polyimide membrane that is used for the preparation of thecross-linked polybenzoxazole-type of membrane in the present inventioncan also be fabricated by a method comprising the steps of dissolvingthe polyimide polymer in a solvent to form a solution of the polyimidematerial, contacting a porous membrane support (e.g., a support madefrom inorganic ceramic material) with this solution and evaporating thesolvent to provide a thin selective layer comprising the polyimidepolymer material on the supporting layer.

The polyimide membrane that is used for the preparation of thecross-linked polybenzoxazole-type of membrane in the present inventioncan also be fabricated as an asymmetric membrane with flat sheet orhollow fiber geometry by phase inversion followed by direct air dryingthrough the use of at least one drying agent which is a hydrophobicorganic compound such as a hydrocarbon or an ether (see U.S. Pat. No.4,855,048). The polyimide membrane can also be fabricated as anasymmetric membrane with flat sheet or hollow fiber geometry by phaseinversion followed by solvent exchange methods (see U.S. Pat. No.3,133,132).

The both hydroxy- and UV cross-linkable functional group-containingpolyimide membrane is then converted to polybenzoxazole polymer membraneby heating between 250 and 600° C. under inert atmosphere such asnitrogen or vacuum. The cross-linked polybenzoxazole polymer membrane isthen formed by UV-cross-linking the polybenzoxazole polymer membraneusing a UV lamp from a distance and for a period of time selected basedupon the separation properties sought. For example, the cross-linkedpolybenzoxazole polymer membrane can be prepared from polybenzoxazolepolymer membrane by exposure to UV radiation using 254 nm wavelength UVlight generated from a UV lamp with 1.9 cm (0.75 inch) distance from themembrane surface to the UV lamp and a radiation time of 30 min at lessthan 50° C. The UV lamp described here is a low pressure, mercury arcimmersion UV quartz 12 watt lamp with 12 watt power supply from AceGlass Incorporated. Optimization of the cross-linking degree in thecross-linked polybenzoxazole polymer membrane should promote thetailoring of the membranes as the primary stage membrane in a multistage membrane process for a wide range of gas, vapor, and liquidseparations with improved permeation properties and environmentalstability. The cross-linking degree of the cross-linked polybenzoxazolepolymer membrane can be controlled by adjusting the distance between theUV lamp and the membrane surface, UV radiation time, wavelength andstrength of UV light, etc. Preferably, the distance from the UV lamp tothe membrane surface is in the range of 0.8 to 25.4 cm (0.3 to 10inches) with a UV light provided from 12 watt to 450 watt low pressureor medium pressure mercury arc lamp, and the UV radiation time is in therange of 0.5 min to 1 hour. More preferably, the distance from the UVlamp to the membrane surface is in the range of 1.3 to 5.1 cm (0.5 to 2inches) with a UV light provided from 12 watt to 450 watt low pressureor medium pressure mercury arc lamp, and the UV radiation time is in therange of 0.5 to 40 minutes.

In some cases a membrane post-treatment step can be added after theformation of the cross-linked polybenzoxazole polymer membrane with athin layer of high permeability material such as a polysiloxane, afluoro-polymer, a thermally curable silicone rubber, or a UV radiationcurable epoxy silicone deposited on the membrane surface. The coatingfills the surface pores and other imperfections comprising voids (seeU.S. Pat. Nos. 4,230,463; 4,877,528; 6,368,382).

The new cross-linked polybenzoxazole polymer membranes as thepre-membrane and secondary membrane in the multi-stage membrane processin the present invention can have either a nonporous symmetric structureor an asymmetric structure with a thin nonporous dense selective layersupported on top of a porous support layer. The porous support can bemade from the same cross-linked polybenzoxazole polymer material or adifferent type of material with high thermal stability. The newcross-linked polybenzoxazole polymer membranes used as the pre-membraneand secondary membrane in the multi-stage membrane process in thepresent invention can be fabricated into any convenient geometry such asflat sheet (or spiral wound), tube, disk, hollow fiber, or thin filmcomposite.

The new type of cross-linked polybenzoxazole polymer membrane used asthe pre-membrane and secondary membrane in the multi-stage membraneprocess in the present invention has the followingproperties/advantages: ease of processability, both high selectivity andhigh permeation rate or flux, high thermal stability, and stable fluxand sustained selectivity over time by resistance to solvent swelling,plasticization and hydrocarbon contaminants.

DETAILED DESCRIPTION OF THE DRAWINGS

Two variations of a conventional two-stage membrane system are shown inFIGS. 1 and 2. In FIG. 1, the retentate is the desired product. In orderto increase the product recovery, permeate from the primary membrane iscompressed and sent to the secondary membrane. Only the permeate fromthe secondary membrane is withdrawn as the waste stream. The residuefrom the secondary membrane is recycled to the primary membrane torecover more products. In FIG. 2, the permeate contains the desiredproduct. In this configuration, the two-stage membrane is used toincrease both the product purity and its recovery.

More specifically, FIG. 1 shows a conventional two-stage membrane system1 (with retentate as product) with a feed 10 being shown enteringprimary membrane unit 12. Retentate stream is shown on side 13 of amembrane 15 and permeate stream is shown on side 16. The retentatestream is the product in FIG. 1 and a stream of product gas is shownexiting at 14. Permeate stream 18 which has a higher concentration ofwaste gases or liquids than that of feed 10 is compressed in compressor20 and compressed permeate stream 22 now enters secondary membrane unit23. Secondary membrane unit 23 has a retentate side 24 of membrane 25and a permeate side 28. Retentate stream 26, which has a higherconcentration in the desired product than that of the compressedpermeate stream 22 is returned to feed stream 10 and permeate wastestream 30 with a higher concentration of waste gases or liquids exitsconventional two-stage membrane system 1.

Conventional two-stage membrane system 2 (with permeate as product) isshown in FIG. 2 with a feed 10 being shown entering primary membraneunit 12. Retentate stream is shown on side 13 of a membrane 15 andpermeate stream is shown on side 16. The permeate stream is the productin FIG. 2 and a stream mostly comprising waste gases or liquids is shownexiting at 14. Permeate stream 18 which has a higher concentration ofproduct than that of feed 10 is compressed in compressor 20 andcompressed permeate stream 22 now enters secondary membrane unit 23.Secondary membrane unit 23 has a retentate side 24 of membrane 25 and apermeate side 28. Retentate stream 27, which has a higher concentrationof waste gases or liquids than that of the compressed permeate gasstream 22 is returned to feed stream 10 to remove waste by primarymembrane unit 12 and product stream 32 with a higher concentration ofproduct exits conventional two-stage membrane system 2.

The membrane systems for this invention are shown in FIGS. 3 and 4. InFIG. 3, a pre-membrane with both high selectivity and high permeance orat least high selectivity membrane materials is used. The membranematerials for the pre-membrane are polybenzoxazole polymers orcross-linked polybenzoxazole polymers. Since the selectivity is veryhigh, the permeate from the pre-membrane has a low concentration of thedesired product components. This permeate can be directly withdrawn asthe waste stream without further processing. The system as shown in FIG.3 can significantly reduce the inter-stage compression cost compared tothe conventional process configuration shown in FIG. 1. The primarymembrane in FIG. 3 is fabricated from a low cost glassy polymer. Thesecondary membrane can be either the same or another low cost glassypolymer membrane or a high selectivity polybenzoxazole polymer orcross-linked polybenzoxazole polymer membrane. If the high selectivitymembrane is applied as the secondary membrane, the product recovery canbe increased. FIG. 4 shows a process where the permeate is the desiredproduct, and the product purity is very important to the application.This process also uses a high selectivity pre-membrane and a possiblehigh selectivity secondary membrane. The permeate from the pre-membranecan be sent to a product stream without further treatment. The membranesystem in FIG. 4 can significantly reduce the inter-stage compressioncost compared to the conventional system shown in FIG. 2 that does notinclude the pre-membrane.

More specifically, FIG. 3 shows a multi-stage membrane system 3 (withretentate as product). A feed 100 is shown entering a pre-membrane unit113 having a retentate side 112 and a permeate side 116 of membrane 115.A permeate waste stream is seen exiting at 118. A retentate stream 120that is higher in concentration of product than feed 100 is seenentering primary membrane unit 121. Retentate stream is shown on side122 of a membrane 123 and permeate stream is shown on side 124. Theretentate stream is seen exiting as product stream 126 and permeatestream 128 is higher in waste gases or liquids than product stream 126.Permeate stream 128 is compressed in compressor 130 and compressedpermeate stream 132 now enters secondary membrane unit 135. Secondarymembrane unit 135 has a retentate side 134 of membrane 133 and apermeate side 136. Stream 140, which has a higher concentration ofproduct gases or liquids than that of compressed permeate stream 132 isreturned to feed stream 100 to recover more product by primary membraneunit 121 and permeate waste stream 138 with a higher concentration ofwaste exits multi-stage membrane system 3. In a variation of the systemshown in FIG. 3, stream 140 can also be returned to stream 120 as thefeed for primary membrane unit 121.

More specifically, FIG. 4 shows a multi-stage membrane system 4 (withpermeate as product). A feed 100 is shown entering a pre-membrane unit113 having a retentate side 112 and a permeate side 116 of membrane 115.A product stream is seen exiting at 119 to be added to the other portionof the product at 142. A retentate stream 120 that is higher inconcentration of waste gases or liquids than feed 100 is seen enteringprimary membrane unit 121. Retentate stream is shown on side 122 of amembrane 123 and permeate gas is shown on side 124. The retentate streamis seen exiting as waste stream 127 and permeate stream 128 is higher inproduct than retentate stream 120. Permeate stream 128 is compressed incompressor 130 and compressed permeate stream 132 now enters secondarymembrane unit 135. Secondary membrane unit 135 has a retentate side 134of membrane 133 and a permeate side 136. Stream 140, which has a higherconcentration of waste gases or liquids than that of the compressedpermeate stream 132 is returned to feed stream 100 to remove waste byprimary membrane unit 121 and product 142 with a higher concentration ofproduct exits multi-stage membrane system 4. In a variation of thesystem shown in FIG. 4, stream 140 can also be returned to stream 120 asthe feed for primary membrane unit 121.

It is preferred that the membrane used as the primary membrane or boththe primary and the secondary membranes in the multi-stage membranesystem of the present invention is fabricated from a low cost glassypolymer with a high glass transition temperature (Tg). It is alsopreferred that the membrane used as a primary membrane or both theprimary and secondary membrane in the multi stage membrane system of thepresent invention exhibits a desired product component selectivity atleast 8, more preferably at least 10 at the operating conditions.

The polymer used for the preparation of the membrane that is used as theprimary membrane or both the primary and the secondary membranes in themulti-stage membrane process of the present invention can be selectedfrom, but is not limited to, polysulfones; sulfonated polysulfones;polyetherimides such as Ultem (or Ultem 1000) sold under the trademarkUltem®, manufactured by GE Plastics; cellulosic polymers, such ascellulose acetate and cellulose triacetate; polyamides; polyimides suchas Matrimid sold under the trademark Matrimid® by Huntsman AdvancedMaterials (Matrimid® 5218 refers to a particular polyimide polymer soldunder the trademark Matrimid®) and P84 or P84HT sold under the tradenameP84 and P84HT respectively from HP Polymers GmbH; polyamide/imides;polyketones, polyether ketones; poly(arylene oxides) such aspoly(phenylene oxide) and poly(xylene oxide);poly(esteramide-diisocyanate); polyurethanes; polyesters (includingpolyarylates), such as poly(ethylene terephthalate), poly(alkylmethacrylates), poly(acrylates), and poly(phenylene terephthalate);polysulfides; polymers from monomers having alpha-olefinic unsaturationin addition to those polymers previously listed includingpoly(ethylene), poly(propylene), poly(butene-1), poly(4-methylpentene-1), polyvinyls, e.g., poly(vinyl chloride), poly(vinylfluoride), poly(vinylidene chloride), poly(vinylidene fluoride),poly(vinyl alcohol), poly(vinyl esters) such as poly(vinyl acetate) andpoly(vinyl propionate), poly(vinyl pyridines), poly(vinyl pyrrolidones),poly(vinyl ethers), poly(vinyl ketones), poly(vinyl aldehydes) such aspoly(vinyl formal) and poly(vinyl butyral), poly(vinyl amides),poly(vinyl amines), poly(vinyl urethanes), poly(vinyl ureas), poly(vinylphosphates), and poly(vinyl sulfates); polyallyls;poly(benzobenzimidazole); polyhydrazides; polyoxadiazoles;polytriazoles; poly (benzimidazole); polycarbodiimides;polyphosphazines; microporous polymers; and interpolymers, includingblock interpolymers containing repeating units from the above polymerssuch as interpolymers of acrylonitrile-vinyl bromide-sodium salt ofpara-sulfophenylmethallyl ethers; and grafts and blends containing anyof the foregoing polymers. Typical substituents providing substitutedpolymers include halogens such as fluorine, chlorine and bromine;hydroxyl groups; lower alkyl groups; lower alkoxy groups; monocyclicaryl; and lower acryl groups.

Some preferred polymers used for the preparation of the membranes thatare used as the primary membrane or both the primary and the secondarymembranes in the multi-stage membrane process of the present inventioninclude, but are not limited to, polysulfones, sulfonated polysulfones,polyetherimides such as Ultem (or Ultem 1000) sold under the trademarkUltem®, manufactured by GE Plastics, and available from GE Polymerland,cellulosic polymers such as cellulose acetate and cellulose triacetate,polyamides; polyimides such as Matrimid sold under the trademarkMatrimid® by Huntsman Advanced Materials (Matrimid® 5218 refers to aparticular polyimide polymer sold under the trademark Matrimid®), P84 orP84HT sold under the tradename P84 and P84HT respectively from HPPolymers GmbH, poly(3,3′,4,4′-benzophenone tetracarboxylicdianhydride-pyromelliticdianhydride-3,3′,5,5′-tetramethyl-4,4′-methylene dianiline)(poly(BTDA-PMDA-TMMDA)), poly(3,3′,4,4′-benzophenone tetracarboxylicdianhydride-pyromellitic dianhydride-4,4′-oxydiphthalicanhydride-3,3′,5,5′-tetramethyl-4,4′-methylene dianiline)(poly(BTDA-PMDA-ODPA-TMMDA)), poly(3,3′,4,4′-diphenylsulfonetetracarboxylic dianhydride-3,3′,5,5′-tetramethyl-4,4′-methylenedianiline) (poly(DSDA-TMMDA)), poly(3,3′,4,4′-benzophenonetetracarboxylic dianhydride-3,3′,5,5′-tetramethyl-4,4′-methylenedianiline) (poly(BTDA-TMMDA)), poly(3,3′,4,4′-diphenylsulfonetetracarboxylic dianhydride-pyromelliticdianhydride-3,3′,5,5′-tetramethyl-4,4′-methylene dianiline)(poly(DSDA-PMDA-TMMDA)),poly[2,2′-bis-(3,4-dicarboxyphenyl)hexafluoropropanedianhydride-1,3-phenylenediamine] (poly(6FDA-m-PDA)),poly[2,2′-bis-(3,4-dicarboxyphenyl)hexafluoropropanedianhydride-1,3-phenylenediamine-3,5-diaminobenzoic acid)](poly(6FDA-m-PDA-DABA)); polyamide/imides; polyketones, polyetherketones; and microporous polymers.

The most preferred polymers used for the preparation of the membranesthat are used as the primary membrane or both the primary and thesecondary membranes in the multi-stage membrane process of the presentinvention include, but are not limited to, polyimides such as Matrimid®,P84®, poly(BTDA-PMDA-TMMDA), poly(BTDA-PMDA-ODPA-TMMDA),poly(DSDA-TMMDA), poly(BTDA-TMMDA), or poly(DSDA-PMDA-TMMDA),polyetherimides such as Ultem®, polysulfones, cellulose acetate,cellulose triacetate, and microporous polymers.

EXAMPLES

The following examples are provided to illustrate one or more preferredembodiments of the invention, but are not limited embodiments thereof.Numerous variations can be made to the following examples that liewithin the scope of the invention.

Example 1 Preparation of Polybenzoxazole Polymer Membrane fromPoly(BTDA-APAF) Polyimide Membrane (Abbreviated as PBO(BTDA-APAF-450C))

A PBO(BTDA-APAF-450C) polybenzoxazole membrane was prepared from ahydroxy-containing polyimide (poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BTDA-APAF)) membrane via high temperature heat treatment at 450°C. for 1 hour in N₂. The poly(BTDA-APAF) polyimide polymer wassynthesized from solution condensation of2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane diamine monomer(APAF) and 3,3′,4,4′-benzophenonetetracarboxylic dianhydride monomer(BTDA).

Example 2 Preparation of Cross-Linked Polybenzoxazole Polymer Membranefrom PBO(BTDA-APAF-450C) Membrane (Abbreviated as Cross-LinkedPBO(BTDA-APAF))

The cross-linked PBO(BTDA-APAF-450C) polymer membrane was prepared byfurther UV cross-linking the PBO(BTDA-APAF-450C) polymer membrane byexposure to UV radiation using 254 nm wavelength UV light generated froma UV lamp with 1.9 cm (0.75 inch) distance from the membrane surface tothe UV lamp and a radiation time of 20 min at 50° C. The UV lampdescribed here is a low pressure, mercury arc immersion UV quartz 12watt lamp with 12 watt power supply from Ace Glass Incorporated.

Example 3 CO₂/CH₄ Separation Performance of PBO(BTDA-APAF-450C) andCross-Linked PBO(BTDA-APAF-450C) Polymer Membranes

The PBO(BTDA-APAF-450C) and the cross-linked PBO(BTDA-APAF-450C) polymermembranes were tested for CO₂/CH₄ separation under testing temperaturesof 50° C. and 100° C., respectively (Table 1). It can be seen from Table1 that the PBO(BTDA-APAF-450C) polymer membrane showed high CO₂permeability (P_(CO2)=535.9 Barrer at 50° C. testing temperature) andmoderate CO₂/CH₄ selectivity (26.0 at 50° C. testing temperature). Aftercross-linking, the cross-linked PBO(BTDA-APAF-450C) polymer membraneshowed significantly increased CO₂/CH₄ selectivity (48.4 at 50° C.testing temperature) compared to the PBO(BTDA-APAF-450C) membrane atboth 50° C. and 100° C. testing temperature.

TABLE 1 Pure gas permeation test results of PBO(BTDA-APAF-450C) and thecross-linked PBO(BTDA-APAF-450C) polymer membranes for CO₂/CH₄Separation Membrane P_(CO2) (Barrer) α_(CO2/CH4) PBO(BTDA-APAF-450C)^(a)535.9 26.0 PBO(BTDA-APAF-450C)^(b) 477.7 12.1 cross-linkedPBO(BTDA-APAF-450C)^(a) 219.5 48.4 cross-linked PBO(BTDA-APAF-450C)^(b)325.3 19.7 ^(a)P_(CO2) and P_(CH4) were tested at 50° C. and 690 kPa(100 psig); ^(b)P_(CO2) and P_(CH4) were tested at 100° C. and 690 kPa(100 psig); 1 Barrer = 10⁻¹⁰ cm³(STP) · cm/cm² · sec · cmHg.

Example 4 Preparation of Polybenzoxazole Polymer Membrane fromPoly(BTDA-APAF) Polyimide Membrane (Abbreviated as PBO(BTDA-APAF-350C))

The PBO(BTDA-APAF-350C) polybenzoxazole membrane was prepared from thehydroxy-containing polyimide (poly[3,3′,4,4′-benzophenonetetracarboxylicdianhydride-2,2-bis(3-amino-4-hydroxyphenyl)-hexafluoropropane](poly(BTDA-APAF)) membrane made in Example 2 via heat treatment at 350°C. for 2 hours in N₂.

Example 5 Preparation of Cross-Linked Polybenzoxazole Polymer Membranefrom PBO(BTDA-APAF-350C) membrane (Abbreviated as Cross-LinkedPBO(BTDA-APAF-350C))

The cross-linked PBO(BTDA-APAF-350C) polymer membrane was prepared byfurther UV cross-linking the PBO(BTDA-APAF-350C) polymer membrane byexposure to UV radiation using 254 nm wavelength UV light generated froma UV lamp with 1.9 cm (0.75 inch) distance from the membrane surface tothe UV lamp and a radiation time of 20 min at 50° C. The UV lampdescribed here is a low pressure, mercury arc immersion UV quartz 12watt lamp with 12 watt power supply from Ace Glass Incorporated.

Example 6 CO₂/CH₄ Separation Performance of PBO(BTDA-APAF-350C) andCross-Linked PBO(BTDA-APAF-350C) Polymer Membranes

The PBO(BTDA-APAF-350C) and the cross-linked PBO(BTDA-APAF-350C) polymermembranes were tested for CO₂/CH₄ separation at 50° C. testingtemperature and 100 psig pure CO₂ and CH₄ gas testing pressure (Table2). It can be seen from Table 2 that the PBO(BTDA-APAF-350C) polymermembrane showed CO₂ permeability (P_(CO2)) of 11.9 Barrer and CO₂/CH₄selectivity (CO₂/CH₄) of 35.3. After cross-linking, the cross-linkedPBO(BTDA-APAF-350C) polymer membrane showed significantly increasedCO₂/CH₄ selectivity (46.8) without significant loss in CO₂ permeabilitycompared to the PBO(BTDA-APAF-350C) membrane.

TABLE 2 Pure gas permeation test results of PBO(BTDA-APAF-350C) and thecross-linked PBO(BTDA-APAF-350C) polymer membranes for CO₂/CH₄Separation P_(CO2) Membrane (Barrer) α_(CO2/CH4) PBO(BTDA-APAF-350C)^(a)11.9 35.3 cross-linked PBO(BTDA-APAF- 11.2 46.8 350C)^(a) ^(a)P_(CO2)and P_(CH4) were tested at 50° C. and 690 kPa (100 psig); 1 Barrer =10⁻¹⁰ cm³(STP) · cm/cm² · sec · cmHg.

Example 7 H₂/CH₄ Separation Performance of Cross-LinkedPBO(BTDA-APAF-350C) Polymer Membrane

The cross-linked PBO(BTDA-APAF-350C) polymer membrane was tested forH₂/CH₄ separation at 50° C. testing temperature and 100 psig pure H₂ andCH₄ gas testing pressure (Table 3). It can be seen from Table 3 that thecross-linked PBO(BTDA-APAF-350C) polymer membrane showed both high H₂permeability (P_(H2)=54.7 Barrer and high H₂/CH₄ selectivity(α_(H2/CH4)=228). These results suggest that this new cross-linkedPBO(BTDA-APAF-350C) polymer membrane is a good candidate membrane forH₂/CH₄ separation application.

TABLE 3 Pure gas permeation test results of cross-linked PBO(BTDA-APAF-350C) polymer membrane for H₂/CH₄ Separation Membrane P_(H2)(Barrer) α_(H2/CH4) cross-linked PBO(BTDA-APAF- 54.7 228.0 350C)^(a)^(a)P_(H2) and P_(CH4) were tested at 50° C. and 690 kPa (100 psig); 1Barrer = 10⁻¹⁰ cm³(STP) · cm/cm² · sec · cmHg.

COMPARABLE EXAMPLES

Six process simulation examples were studied to compare the multi-stagemembrane system proposed in this invention with the conventionalmulti-stage membrane system. Comparable Example 1 was a conventionaltwo-stage membrane system using the currently commercially availablemembranes to remove CO₂ from natural gas. The process flow scheme isshown in FIG. 1. Comparable Example 2 simulated the process shown inFIG. 3 using the cross-linked high selectivity PBO polymer listed inTABLE 2 as the material to make the pre-membranes. Comparable Example 3was the same as Comparable Example 2 except that the secondary membranesin Comparable Example 3 were made from the cross-linked high selectivityPBO polymer listed in TABLE 2.

Comparable Example 4 shows a two-stage membrane system for hydrogenpurification using the commercially available lower selectivitymembranes in both stages. The process flow scheme for Comparable Example4 is shown in FIG. 2. In Comparable Example 5, the cross-linked highselectivity PBO membranes shown in TABLE 3 were used as thepre-membranes. Comparable Example 6 is the same as Comparable Example 5except that the secondary membranes in Comparable Example 6 were madefrom the cross-linked high selectivity PBO polymer listed in TABLE 3.The process flow scheme for Comparable Examples 5 and 6 is shown in FIG.4.

Comparable Examples 1, 2, and 3 were for CO₂ removal from natural gas.In these examples, a fresh natural gas feed with 60% CO₂ and the productspec for CO₂ at 8% were assumed. In Comparable Examples 1, 2, and 3, thecommercially available membrane (for the primary membrane and thesecondary membrane) was assumed to be a membrane with typicalperformance in the current natural gas upgrading market. In ComparableExamples 2 and 3, the cross-linked PBO (shown in TABLE 2) material wasassumed to make the membranes with a skin layer thickness of 75 nm. Thepermeance of the new cross-linked PBO membrane (used as the pre-membranein Comparable Example 2, and as pre-membrane and secondary membrane inComparable Example 3) was assumed at 0.00409 m³ (STP)/m²·h·kPa based onthe permeability measured for the dense film shown in TABLE 2, and theselectivity was assumed at 40 at 50°, which is lower than theselectivity of a dense film shown in TABLE 2. A process simulation basedon the above performance was performed for Comparable Examples 1, 2 and3. The results are shown in TABLE 4.

TABLE 4 Simulation Results for Comparable Examples 1, 2 and 3 ComparableComparable Comparable Example 1 Example 2 Example 3 Feed Flow, m³(STP)/h5.9 × 10⁵ 5.9 × 10⁵ 5.9 × 10⁵ CO₂ in Feed, % 60 60 60 CO₂ in ProductRequired, % 8 8 8 Membrane Feed Temperature, 50 50 50 C. Membrane FeedPressure, 3792.3 3792.3 3792.3 KPa Total Membrane Area, % Base 97.6105.6 Pre-Membrane Area as NA 28.2 26.0 Percentage of Total MembraneArea, % Secondary Membrane Area as 23.0 12.5 18.3 Percentage of TotalMembrane Area, % Compressor Power Change, % Base −38.2 −36.8 TotalHydrocarbon Recovery, 95.8 95.8 97.0 %

Comparing the above examples, Comparable Examples 2 and 3 demonstratedsignificant compression cost saving. In Comparable Example 2, thecompressor power reduced 38.2% compared to the base case which is theComparable Example 1. The compressor power reduced 36.8% for ComparableExample 3. The total membrane area used for the above three examples didnot change much, with Comparable Example 2 slightly lower and ComparableExample 3 slightly higher. Due to the higher selectivity of thesecondary membrane in Comparable Example 3, the hydrocarbon recoveryincreased from 95.8% of the Comparable Examples 1 and 2 to 97%. TABLE 4shows that the area of the pre-membrane and the secondary membrane isrelatively small compared to the primary membrane. Hence, the cost ofthe membrane system will not increase much even the higher costcross-linked PBO (shown in TABLE 2) material is used to make thepre-membranes and secondary membranes.

Comparable Examples 4, 5, and 6 were for hydrogen purification. In theseexamples, a fresh hydrocarbon and hydrogen feed with 70% hydrogen wasassumed. The product spec of the hydrogen stream was 95% minimalhydrogen purity. In Comparable Examples 4, the commercially availablemembrane (for the primary membrane and the secondary membrane) wasassumed to be a membrane with typical performance as the currentcommercially available hydrogen membrane. In Comparable Examples 5 and6, the cross-linked PBO (shown in TABLE 3) material was assumed to makethe membranes with a skin layer thickness of 150 nm. The permeance ofthe new cross-linked PBO membrane (used as the pre-membrane inComparable Example 5, and as the pre-membrane and the secondary membranein Comparable Example 6) was assumed at 0.01 m³ (STP)/m²·h·kPa based onthe permeability measured for the dense film shown in TABLE 3, and theselectivity was assumed at 220 at 50° C., which is lower than theselectivity of a dense film shown in TABLE 3. A process simulation basedon the above performance was performed for Comparable Examples 4, 5 and6. The results are shown in TABLE 5.

TABLE 5 Simulation Results for Comparable Examples 4, 5, and 6Comparable Comparable Comparable Example 4 Example 5 Example 6 FeedFlow, m³(STP)/h 5.9 × 10⁵ 5.9 × 10⁵ 5.9 × 10⁵ H₂ in Feed, % 70 70 70Product Hydrogen Purity, % 95.0 95.0 96.6 Membrane Feed Temperature, 5050 50 C. Membrane Feed Pressure, 5516 5516 5516 KPa Total Membrane Area,% Base 117.3 121.6 Pre-Membrane Area as NA 31.2 31.6 Percentage of TotalMembrane Area, % Secondary Membrane Area as 44.1 23.6 22.8 Percentage ofTotal Membrane Area, % Compressor Power Change, % Base −30.1 −26.8

It can be seen from the above table that Comparable Example 5 andComparable Example 6 can save 30.1% and 26.8% of the compression costcompared to Comparable Example 4 due to the usage of high selectivitymembrane in the pre-membrane. However, the membrane area increase islarger than that of the natural gas cases. Comparable case 5 showed a17.3% membrane area increase while Comparable case 6 showed a 21.6%membrane area increase. Since the energy cost is high now, the lowoperating cost (low compression cost) will buy the extra capital (moremembrane area). Comparable Example 6 shows high hydrogen purity due tothe use of the high selectivity membrane materials for the secondarymembrane.

1. A process for separating a mixture of gases or liquids comprisingsending said mixture of gases or liquids to a pre-membrane to separatethem into a first permeate stream which passes through the pre-membraneand a first retentate stream that does not pass through thepre-membrane; sending said first retentate stream to a primary membraneto separate said first retentate stream into a second permeate streamand a second retentate stream; and then sending said second permeatestream to a secondary membrane to separate it into a third permeatestream and a third retentate stream and wherein said pre-membranecomprises a UV cross-linked polybenzoxazole membrane prepared from apolyimide represented by formula (I):

where X1 of formula (I) is

or mixtures thereof, X2 of formula (I) is either the same as X1or isselected from

or mixtures thereof, —Y— of formula (I) is

or mixtures thereof, —R— is

or mixtures thereof, and wherein said primary membrane comprises amembrane selected from the group consisting of cellulose acetatemembrane, polyimide membrane, UV cross-linkable polybenzoxazolemembrane, UV cross-linked polybenzoxazole membrane, and mixtures thereofand said secondary membrane comprises a UV cross-linkablepolybenzoxazole membrane or a UV cross-linked polybenzoxazole membrane.2. The process of claim 1 wherein said first permeate stream compriseswaste gases or liquids that are removed from said pre-membrane and saidfirst retentate stream comprises product gases or liquids.
 3. Theprocess of claim 1 wherein said first permeate stream comprises aproduct stream and said first retentate stream comprises waste gases orliquids.
 4. The process of claim 1 wherein said second retentate streamcomprises a product stream and said second permeate stream compriseswaste gases or liquids.
 5. The process of claim 1 wherein said secondretentate stream comprises waste gases or liquids and said secondpermeate stream comprises product gases and liquids.
 6. The process ofclaim 1 wherein said third permeate stream comprises a waste stream andsaid third retentate stream comprises product gases or liquids, which isrecycled to pre-membrane and/or primary membrane.
 7. The process ofclaim 1 wherein said third permeate stream comprises a product streamand said third retentate stream comprises waste gases or liquids, whichis recycled to pre-membrane and/or primary membrane.
 8. The process ofclaim 1 wherein said primary membrane is a UV cross-linkedpolybenzoxazole membrane prepared from a polyimide represented byformula (I):

where X1 of formula (I) is

or mixtures thereof, X2 of formula (I) is either the same as X1 or isselected from

or mixtures thereof, —Y— of formula (I) is

or mixtures thereof, —R— is

or mixtures thereof.
 9. The process of claim 1 wherein secondarymembrane is a UV cross-linked polybenzoxazole membrane prepared from apolyimide represented by formula (I):

where X1 of formula (I) is

or mixtures thereof, X2 of formula (I) is either the same as X1 or isselected from

or mixtures thereof, —Y— of formula (I) is

or mixtures thereof, —R— is

or mixtures thereof.
 10. The process of claim 1 wherein saidpre-membrane, said primary membrane and said secondary membrane are in aform selected from the group consisting of sheets, disks, tubes andhollow fibers.